Stanford Nanofabrication Facility: Dry Etching - Introduction (Part 1 of 4)

Transcript

Hi, I'm Jim McVittie of Stanford Nanofabrication Facility at Stanford University. In this series of four short presentations, I'm going to discuss the basics of dry or plasma etching and give some information to help you choose the right type of plasma etch tool and process for fabricating your nanostructures. So in this first lecture, I'm going to... Read More